Thermal Conductivity Gauge
AssigneeMKS Instruments, Inc.
InventorsGerardo A. Brucker, Timothy C. Swinney
Life of this patent
Estimating the term…
Abstract
A thermal conductivity gauge measures gas pressure within a chamber. A sensor wire and a resistor form a circuit coupled between a power input and ground, where the sensor wire extends into the chamber and connects to the resistor via a terminal. A controller adjusts the power input, as a function of a voltage at the terminal and a voltage at the power input, to bring the sensor wire to a target temperature. Based on the adjusted power input, the controller can determine a measure of the gas pressure within the chamber.
Claims23
A thermal conductivity gauge for measuring gas pressure, comprising:
- a sensor wire within a chamber coupled to a terminal and a ground;
- a resistor coupled between the terminal and a power input;
- a controller configured to 1) apply the power input to the resistor;
- 2) adjust the power input, as a function of a voltage at the terminal and a voltage at the power input, to bring the sensor wire to a target temperature;
- and 3) determine a measure of gas pressure within the chamber based on the adjusted power input.
A method of measuring gas pressure, comprising:
- applying a power input through a resistor and sensor wire connected in series, the sensor wire being coupled to a terminal and a ground within a chamber, the resistor being coupled between the terminal and a power input;
- adjusting the power input, as a function of a voltage at the terminal and a voltage at the power input, to bring the sensor wire to a target temperature;
- and
- determining a measure of gas pressure within the chamber based on the adjusted power input.
A thermal conductivity gauge for measuring gas pressure, comprising:
- a circuit comprising a sensor wire and a resistor coupled in series, the sensor wire being positioned within a chamber;
- and
- a controller configured to 1) apply a power input to the circuit;
- 2) adjust the power input, as a function of a voltage across one of the sensor wire and the resistor, to bring the sensor wire to a target temperature;
- and 3) determine a measure of gas pressure within the chamber based on the adjusted power input.
Dependencies are inferred from the claim text.