Imaging devices having piezoelectric transceivers
AssigneeExo Imaging, Inc.
InventorsSandeep Akkaraju, Haesung Kwon, Brian Bircumshaw
Life of this patent
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Abstract
A micromachined ultrasonic transducer (MUT). The MUT includes: a substrate; a membrane suspending from the substrate; a bottom electrode disposed on the membrane; a piezoelectric layer disposed on the bottom electrode and an asymmetric top electrode is disposed on the piezoelectric layer. The areal density distribution of the asymmetric electrode along an axis has a plurality of local maxima, wherein locations of the plurality of local maxima coincide with locations where a plurality of anti-nodal points at a vibrational resonance frequency is located.
Claims27
A micromachined ultrasonic transducer (MUT), comprising:
- an asymmetric electrode.
The MUT of claim 6, further comprising:
- a substrate;
- a membrane suspending from the substrate;
- a bottom electrode disposed on the membrane;
- a piezoelectric layer disposed on the bottom electrode;
- and
- a top electrode disposed on the piezoelectric layer,
- wherein the top electrode is the asymmetric electrode.
A micromachined ultrasonic transducer (MUT), comprising:
- a symmetric electrode,
- wherein an areal density distribution of the symmetric electrode along an axis has a plurality of local maxima and wherein locations of the plurality of local maxima coincide with locations where a plurality of anti-nodal points at a vibrational resonance frequency are located.
An imaging device, comprising:
- a transducer array including a plurality of micromachined ultrasonic transducers (MUTs), each of the plurality of MUTs comprising:
- an asymmetric electrode.
An imaging device, comprising:
- a transducer array including a plurality of micromachined ultrasonic transducers (MUTs), each of the plurality of MUTs comprising:
- a symmetric electrode,
- wherein an areal density distribution of the symmetric electrode along an axis has a plurality of local maxima and wherein locations of the plurality of local maxima coincide with locations where a plurality of anti-nodal points at a vibrational resonance frequency are located.
Dependencies are inferred from the claim text.