US 2019/0316898 A1 · INSTANTANEOUS PHASE MAPPING DEFLECTOMETRY

Abstract

Provided are instantaneous phase mapping deflectometry measurement systems and methods based on multiplexing phase shifted fringe patterns with color, and decomposing them in X and Y using Fourier techniques. The new methods and devices provide accurate measurements, and more robust tools with less uncertainty when reconstructing a surface (e.g., compared to prior art Fourier Transform Profilometry (FTP) methods). The systems and methods revolutionize the applications of deflectometry by enabling measuring dynamic events (e.g., in high vibration environments, and a host of other previously impossible scenarios), and including environmental changes to the bending modes of large optics. Methods of error correction applicable to the new methods and devices are also provided.

Claims25

Dependent claims

1-39. (canceled)

A non-contact instantaneous phase mapping deflectometry system to measure a surface, comprising:

a display positioned proximate a first side of a surface to be measured;
a display pattern generator configured to generate a multiplexed pattern to display on the display, the multiplexed display pattern comprising, in each of two orthogonal directions, at least three fringe patterns, each fringe pattern comprising a plurality of fringes sufficient to provide a carrier frequency such that the component x and y fringes are distinguishable in the Fourier domain and each fringe pattern having distinct color-encoded phase shift information to provide a distinctly multiplexed display pattern comprising, in each of two orthogonal directions, a phase-shifted multiplexed fringe pattern having distinct color-encoded phase shift information;
an imaging device positioned to detect an input image comprising at least a portion of the phase-shifted multiplexed fringe pattern after interaction with the surface, and to generate an electronic image thereof, the imaging device having at least three separately readable color channels to obtain at least three respective sets of data corresponding to the at least three phase shifts to provide at least three phase-shifted images;
and
an image analyzer configured to analyze each of the at least three phase-shifted images by Fourier transform to provide distinct peaks in the Fourier domain at the locations corresponding to the carrier frequencies of the display fringes in the x and y directions, the image analyzer configured to apply filters or masks that isolate only the x or y frequency to decompose each of the at least three phase-shifted images into two separate one-directional fringe images, the image analyzer configured to apply an inverse Fourier transform to the filtered data to reconstruct the one-directional fringe patterns that made up the input image to provide, based on a single input image, at least six unique outputs corresponding to the at least three phase shift fringe patterns in both orthogonal directions required for reconstruction of the surface.

2 more elements

A non-contact instantaneous phase mapping deflectometry system to measure a surface, comprising:

a programmable display screen that is programmed to display a phase-shifted multiplexed fringe pattern having, in each of two orthogonal directions, distinct color-encoded phase shift information, such that upon the screen being placed at a known distance in front of a specular surface, the display screen is operable to produce an input pattern reflected from the surface;
an imaging device located proximate the display screen and focused on the surface, the imaging device configured to generate an output image to provide slope information in two orthogonal directions based on a single input image comprising at least a portion of the input pattern reflected from the surface;
and
a computing device configured to calculate slopes of the surface based on the slope information and to integrate the slopes to give the surface topography, wherein the computing device is further configured to:
compute a difference between a conventional phase shifting measurement and an instantaneous measurement for a common nominal state to provide a difference map;
and
apply the difference map as a correction in a surface height domain of a dynamic data set to remove spatial frequency errors.

4 more elements

A non-contact instantaneous phase mapping deflectometry method to measure a surface, comprising:

positioning a display proximate a first side of a surface to be measured;
generating a multiplexed pattern to display on the display, the multiplexed display pattern comprising, in each of two orthogonal directions, at least three fringe patterns, each fringe pattern comprising a plurality of fringes sufficient to provide a carrier frequency such that the component x and y fringes are distinguishable in the Fourier domain and each fringe pattern having distinct color-encoded phase shift information to provide a distinctly multiplexed display pattern comprising, in each of two orthogonal directions, a phase-shifted multiplexed fringe pattern having distinct color-encoded phase shift information;
detecting, using an imaging device, an input image comprising at least a portion of the phase-shifted multiplexed fringe pattern after interaction with the surface to obtain at least three respective sets of data corresponding to the color-encoded phase shift information to provide at least three phase-shifted images;
analyzing the at least three phase-shifted images by Fourier transform to provide distinct peaks in the Fourier domain at the locations corresponding to the carrier frequencies of the display fringes in the x and y directions;
filtering or masking to isolate only the x or y frequency to decompose each of the at least three phase-shifted images into two separate one-directional fringe images;
and
applying an inverse Fourier transform to the filtered data to reconstruct the one-directional fringe patterns that made up the input image to provide, based on a single input image, at least six unique outputs corresponding to the at least three phase shift fringe patterns in both orthogonal directions required for reconstruction of the surface.

4 more elements

A non-contact instantaneous phase mapping deflectometry method to measure a surface, comprising:

displaying, on a display screen, a phase-shifted multiplexed fringe pattern having, in each of two orthogonal directions, distinct color-encoded phase shift information, such that upon the screen being placed at a known distance in front of a specular surface, the display screen is operable to produce an input pattern reflected from the surface;
generating an output image, using an imaging device located proximate the display screen and focused on the surface, to provide slope information in two orthogonal directions based on a single input image comprising at least a portion of the input pattern reflected from the surface;
calculating, using a computing device, the slopes of the surface and integrating the slopes to give the surface topography;
computing a difference between a conventional phase shifting measurement and an instantaneous measurement for a common nominal state to provide a difference map;
and
applying the difference map as a correction in a surface height domain of a dynamic data set to remove spatial frequency errors.

3 more elements

Dependencies are inferred from the claim text.

Instantaneous phase mapping deflectometry

Life of this patent

Instantaneous phase mapping deflectometry

Life of this patent

Abstract

Claims25