Flow rate adjustment valve, and fluid control apparatus in which the flow rate adjustment valve is used
AssigneeFujikin Incorporated
InventorsRyousuke Dohi, Taiji Chiba, Kazunari Watanabe
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AssigneeFujikin Incorporated
InventorsRyousuke Dohi, Taiji Chiba, Kazunari Watanabe
Estimating the term…
Provided is a flow rate adjustment valve of a motor-operated valve type, which overcomes the problems that flow rate adjustment valves of a manual valve type have, while making full use of compactness the manual valves have. The flow rate adjustment valve includes a rotation device that rotates a rotation member to cause a vertically movable body to move vertically. The rotation device includes: a driven gear disposed at an upper end portion of the rotation member; and a motor that rotates a driving gear engaged with the driven gear. The motor, which is a stepping servo motor, is disposed below the driving gear and has a rotary shaft extending upward. The driving gear is fixed to an upper end portion of the rotary shaft.
A flow rate adjustment valve including:
Dependencies are inferred from the claim text.