Quartz glass crucible and manufacturing method thereof
AssigneeSumco Corporation
InventorsHiroshi KISHI, Masanori FUKUI
Life of this patent
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AssigneeSumco Corporation
InventorsHiroshi KISHI, Masanori FUKUI
Estimating the term…
In an exemplary embodiment, a quartz glass crucible 1 includes: a high-aluminum-content layer 14B which is made of quartz glass having a relatively high average aluminum concentration and is provided to form an outer surface 10b of the quartz glass crucible 1; and a low-aluminum-content layer 14A which is made of quartz glass having a lower average aluminum concentration than that of the high-aluminum-content layer 14B and is provided on an inner side of the high-aluminum-content layer 14B, wherein the low-aluminum-content layer 14A includes an opaque layer 11 made of quartz glass containing a large number of minute bubbles, and the high-aluminum-content layer 14B is made of transparent or translucent quartz glass having a lower bubble content than that of the opaque layer 11. The quartz glass crucible is capable of withstanding a single crystal pull-up step undertaken for a very long period of time.
A quartz glass crucible for pulling up a silicon single crystal, comprising:
A manufacturing method of a quartz glass crucible according to a rotating mold method, the manufacturing method comprising:
Dependencies are inferred from the claim text.