Film-forming apparatus, method for producing film-formed product using same, and cooling panel

A cooling panel held by one target holder of a plurality of target holders of a film-forming apparatus including a film forming chamber, a substrate supporting part that supports a substrate inside the film forming chamber, at least one target having an opposing face that opposes the substrate, the plurality of target holders each configured to detachably hold the target, and a cooling unit that cools the plurality of target holders, the target holder selectively holding the target or the cooling panel, the cooling panel comprising:

• a held part having a shape enabling the held part to be detachably held by the target holder;
• and
• a heat receiving part having a heat receiving face that opposes the substrate in a state where the held part is held by the target holder and receives radiation heat emitted from the substrate,
• wherein
• the held part is configured to be held by the target holder so that the radiation heat received by the heat receiving face is transferred to the target holder holding the held part.