Laser ablation arrangement and method
AssigneePulsedeon Oy
InventorsVille KEKKONEN, Mikael SILTANEN
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AssigneePulsedeon Oy
InventorsVille KEKKONEN, Mikael SILTANEN
Estimating the term…
The present invention introduces a laser ablation arrangement and a corresponding method for PLD applications, where circular scanning patterns are utilized to achieve high scanning velocities on target surfaces for efficient coating process. The arrangement allows for flexible positioning of targets and scan lines in order to optimize coating uniformity on large surface areas as well as high duty cycle for scanning. These features are all essential for achieving efficient industrial coating processes. Fast optical switching and synchronized rotation of scanning mirrors enable efficient distribution of laser energy along long scan line paths on target surfaces.
A laser ablation arrangement for coating a substrate, wherein the arrangement comprises
A laser ablation method for coating a substrate, which method comprises the steps of
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