Method for forming a temperature compensated dielectric material
AssigneeSkyworks Solutions, Inc.
InventorMichael David Hill
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Abstract
Disclosed are embodiments of tungsten bronze crystal structures that can have both a high dielectric constant and low temperature coefficient, making them advantageous for applications that experience temperature changes and gradients. In particular, tantalum can be substituted into the crystal structure to improve properties. Embodiments of the material can be useful for radiofrequency applications such as resonators and antennas.
Claims21
A method of forming a temperature compensated dielectric material, the method comprising modifying a Ba—Sm—Ti—O tungsten bronze structure by inserting tantalum and adjusting barium and samarium content to balance the charges, the temperature compensated dielectric material having a dielectric constant of at least 60, a Qf at 1 GHz of at least 7000, and a temperature coefficient of resonant frequency of less than 15.
(canceled)
A method of forming a temperature compensated dielectric material having a high dielectric constant while maintaining a low temperature coefficient of resonant frequency, the method comprising modifying a tungsten bronze crystal structure including Ba, Sm, Ti, and O and incorporating Ta into the tungsten bronze crystal structure to form the temperature compensated dielectric material having a chemical formula Ba12+3xSm28−3xTi54−3xTa3xO162, x being between 0 and 3.
A method of forming a temperature compensated dielectric material having a high dielectric constant while maintaining a low temperature coefficient of resonant frequency, the temperature compensated dielectric material comprising a chemical formula Ba12.6Sm27.4Ti53.4Ta0.6O162.
Dependencies are inferred from the claim text.