Ejection-material injecting method, ejection-material ejection apparatus, and imprinting apparatus
AssigneeCanon Kabushiki Kaisha
InventorsYutaka Mita, Tsuyoshi Arai
Life of this patent
Estimating the term…
Abstract
An ejection material is injected into a container through a pipe. Thereafter, the pipe is blocked at a blocked part and then the pipe is cut off. The pipe is cut off such that the blocked part is included in a portion of the pipe connected to the container.
Claims19
An ejection-material injecting method of injecting an ejection material into a container in an ejection apparatus capable of ejecting the ejection material in the container from an ejection head, comprising:
- a connecting step of connecting the container and a tank configured to contain the ejection material to each other by using a pipe;
- an injecting step of injecting the ejection material in the tank into the container through the pipe;
- a blocking step of blocking the pipe in a state of being connected between the tank and the container after the injecting step;
- and
- a cutting step of cutting off the pipe after the blocking step such that the pipe is separated into a first portion connected to the container and a second portion connected to the tank, and that a blocked part of the pipe blocked in the blocking step is included in the first portion.
An ejection-material ejection apparatus comprising:
- a container configured to contain an ejection material;
- an ejection head capable of ejecting the ejection material in the container;
- a pipe connected to the container so as to inject the ejection material into the container;
- and
- a covering configured to cover the pipe, wherein
- the pipe includes a blocked part blocked after injection of the ejection material into the container, and a cut-off part cut off in such a way as to retain the blocked part.
An imprinting apparatus configured to process a substrate by transferring a pattern of a mold to an imprint material applied to the substrate, comprising:
- an imprint-material ejection apparatus configured to eject the imprint material in a container from an ejection head so as to apply the imprint material onto the substrate, wherein
- the imprint-material ejection apparatus includes a pipe connected to the container so as to inject the imprint material into the container, and a covering configured to cover the pipe, and
- the pipe includes a blocked part blocked after injection of the imprint material into the container, and a cut-off part cut off in such a way as to retain the blocked part.
Dependencies are inferred from the claim text.