US 2019/0314922 A1Published application

Method of Manufacturing Radio Frequency (RF) Coil Multi-Driven RF Based-Ve Ion Source

AssigneeInstitute for Plasma Research

InventorsJaydeep Joshi, Chandra Mouli Rotti, Arun Kumar Chakraborty, Mainak Bandyopadhyay, Agrajit Gahlaut, Milind Kumar Patel, Venkata Nagaraju Muvvala, Deepak Kumar Parmar

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Abstract

A method of manufacturing Radio Frequency (RF) coil for multi-driven RF based-ve Ion source includes the steps of: (a) manufacturing a tube using stainless steel grade as a substrate material; (b) coating the tube; and (c) joining a plurality of coils produced by step (a) and step (b) by orbital TIG welding process.

Claims9

Dependent claims

A method of manufacturing Radio Frequency (RF) coil for multi-driven RF based-ve Ion source, the method comprising the steps of:

a) manufacturing a tube using stainless steel grade as a substrate material;
b) coating the tube;
and
c) joining a plurality of coils produced by step (a) and step (b) by orbital TIG welding.

1 more element

Dependencies are inferred from the claim text.