Laser cleaning apparatus and laser cleaning method

A laser cleaning method for cleaning a test piece, comprising:

• providing a laser cleaning apparatus including
• a laser module,
• a wavelength switching unit,
• a laser beam regulating module including an energy compensation unit and a divergence angle optimization unit, and
• at least one optical element;
• providing a laser beam through the laser module;
• adjusting the wavelength switching unit to allow the laser beam to pass through a double-frequency crystal to generate a laser beam containing green light with a wavelength of 532 nm and infrared light with a wavelength of 1064 nm, and to then pass through a beam splitter to generate a green laser beam with a wavelength of 532 nm to be outputted to the laser beam regulating module;
• guiding the green laser beam provided by the laser module through the optical element to pass through at least one of the energy compensation unit and the divergence angle optimization unit;
• propagating the green laser beam from the at least one of the energy compensation unit and the divergence angle optimization unit by an optical path propagating module and performing a first cleaning process to clean dirty layers containing tin (Sn) at tips of probes on the test piece;
• adjusting an angle of a reflecting mirror in the wavelength switching unit to allow the laser beam of the laser module to pass underneath the reflecting mirror, and outputting an infrared laser beam with a wavelength of 1064 nm into the laser beam regulating module;
• guiding the infrared laser beam provided by the laser module through the optical element to pass through at least one of the energy compensation unit and the divergence angle optimization unit;
• and
• propagating the infrared laser beam from the at least one of the energy compensation unit and the divergence angle optimization unit by the optical path propagating module and performing the first cleaning process to clean the dirty layers containing tin oxide (SnO2) at the tips of the probes.

A laser cleaning method for cleaning a test piece, comprising:

• providing a laser cleaning apparatus including
• a laser module,
• a wavelength switching unit,
• a laser beam regulating module including an energy compensation unit and a divergence angle optimization unit, and
• at least one optical element;
• providing a laser beam through the laser module;
• adjusting the wavelength switching unit to allow the laser beam to pass through a double-frequency crystal to generate a laser beam containing green light with a wavelength of 532 nm and infrared light with a wavelength of 1064 nm, which then passes through a reflecting mirror to be outputted to the laser beam regulating module;
• guiding the laser beam with green light and infrared light provided by the laser module through the optical element to pass through at least one of the energy compensation unit and the divergence angle optimization unit;
• and
• propagating the laser beam with green light and infrared light from the at least one of the energy compensation unit and the divergence angle optimization unit by an optical path propagating module and performing a cleaning process to clean dirty layers containing tin (Sn) and an oxide layer (SnO2) at tips of probes of the test piece.