Trap assembly and system for trapping polymer vapors in process oven vacuum systems
OwnerWilliam Moffat, Craig Walter Mccoyinventors
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OwnerWilliam Moffat, Craig Walter Mccoyinventors
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A trap system adapted to trap polyimide or other vapors exiting from a process chamber. The vapors are routed from the process chamber through a heated exit line at low pressure and then cooled, resulting in condensation at a selected location. The condensed vapors accumulate in a liquid trap. A method of condensing polymer vapors in vacuum exit lines of process chambers, where the flow which may have vaporized polymer vapor is cooled to enhance condensation at a chosen location. The liquid trap can be emptied and replaced, resulting in the removal of the condensed liquid. The chamber exit lines are protected from condensation build up.
A polymer trap assembly, said polymer trap assembly comprising:
A bake oven assembly adapted for the drying and imidization of polymer, said bake oven assembly comprising:
Dependencies are inferred from the claim text.