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US 2019/0296216 A1Published application
Transparent piezoelectric device and method for manufacturing the same
AssigneeLuxembourg Institute of Science and Technology (List)
InventorsDaniele Sette, Emmanuel Defay
Life of this patent
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Abstract
The invention is directed to a transparent piezoelectric device comprising a transparent substrate; a transparent piezoelectric layer; a transparent layer of interdigitated electrodes. The transparent piezoelectric layer is disposed between the substrate and the layer of interdigitated electrodes.
Claims18
-14. (canceled)
A transparent piezoelectric device, said device comprising:
- a transparent substrate;
- a transparent piezoelectric layer;
- a transparent layer of interdigitated electrodes, the piezoelectric layer being disposed between the substrate and the layer of interdigitated electrodes;
- and
- a transparent dielectric layer between the substrate and the piezoelectric layer, the dielectric layer having a thickness comprised between 1 nm and 30 nm.
2 more elements
A method for producing a transparent piezoelectric device, said method comprising the following steps of:
- providing a transparent substrate;
- depositing a transparent piezoelectric layer on the transparent substrate;
- depositing a transparent layer of interdigitated electrodes on the transparent substrate, wherein the step of depositing a transparent piezoelectric layer is performed before the step of depositing a transparent layer of interdigitated electrodes;
- and
- depositing a transparent dielectric layer on the transparent substrate before the step of depositing a transparent piezoelectric layer on the transparent substrate, the dielectric layer having a thickness comprised between 1 and 30 nm.
2 more elements
Dependencies are inferred from the claim text.