Semiconductor package manufacturing method

A semiconductor package manufacturing method for manufacturing a plurality of individual semiconductor packages, comprising:

• a holding step of holding a package substrate by using a holding jig or a holding tape, the package substrate being previously formed by bonding a plurality of semiconductor chips to a plurality of separate regions on a front side of a wiring member, the separate regions being defined by a plurality of crossing division lines, and next supplying a sealing compound to the front side of the wiring member to thereby form a sealing layer from the sealing compound on the front side of the wiring member, whereby the package substrate is composed of the wiring member, the semiconductor chips bonded to the wiring member, and the sealing layer sealing the semiconductor chips, a back side of the wiring member of the package substrate being held by the holding jig or the holding tape;
• a dividing step of cutting the package substrate along each division line to a depth corresponding to a middle of a thickness of the holding tape or corresponding to an inside of the holding jig by using a profile grinding tool after performing the holding step, thereby dividing the package substrate into the plurality of individual semiconductor packages;
• the profile grinding tool having at least two projections arranged so as to correspond to any adjacent ones of the division lines and an uneven working surface formed between the two projections;
• and
• the dividing step including the steps of cutting the package substrate along the division lines by using the two projections to thereby divide the package substrate into the individual semiconductor packages and simultaneously cutting a front side of the sealing layer to a depth not reaching a front side of each semiconductor chip by using the uneven working surface, thereby forming a plurality of ridges and grooves on the front side of the sealing layer to thereby improve a surface area of the front side of the sealing layer.

A semiconductor package manufacturing method for manufacturing a plurality of individual semiconductor packages, comprising:

• a chip bonding step of bonding a plurality of semiconductor chips to a plurality of separate regions on a front side of a wiring member, the separate regions being defined by a plurality of crossing division lines;
• a package substrate forming step of setting a mold on the front side of the wiring member so as to define a space between the mold and a front side of each semiconductor chip, the mold having an uneven inner surface, and next supplying a sealing compound into the space defined between the mold and the front side of each semiconductor chip to thereby form a sealing layer from the sealing compound on the wiring member, a front side of the sealing layer being formed with a plurality of ridges and grooves transferred from the uneven inner surface of the mold, thereby obtaining a package substrate composed of the wiring member, the semiconductor chips bonded to the wiring member, and the sealing layer sealing the semiconductor chips;
• and
• a dividing step of dividing the package substrate along each division line to obtain the plurality of individual semiconductor packages after performing the package substrate forming step.