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US 2019/0293922 A1Published application
Laser apparatus and extreme ultraviolet light generation system
AssigneeGigaphoton Inc.
InventorsHiroyuki ITO, Hiroshi TANAKA
Life of this patent
Estimating the term…
Abstract
A laser apparatus may include: a mirror configured to reflect a laser beam; an actuator configured to operate the mirror; and a controller configured to transmit a movement instruction to the actuator, wherein the controller predicts a movement completion time of the actuator, and transmits a polling signal so that the actuator receives the polling signal after expiration of the predicted movement completion time.
Claims6
A laser apparatus comprising:
- a mirror configured to reflect a laser beam;
- an actuator configured to operate the mirror;
- and
- a controller configured to transmit a movement instruction to the actuator,
- the controller predicting a movement completion time of the actuator, and transmitting a polling signal so that the actuator receives the polling signal after expiration of the predicted movement completion time.
2 more elements
An extreme ultraviolet light generation system comprising:
- an actuator configured to operate an object to be moved;
- and
- a controller configured to transmit a movement instruction to the actuator,
- the controller predicting a movement completion time of the actuator, and transmitting a polling signal to inquire a state of the actuator so that the actuator receives the polling signal after expiration of the movement completion time.
1 more element
Dependencies are inferred from the claim text.