Resin, resist composition and method for producing resist pattern
AssigneeSumitomo Chemical Company, Limited
InventorsTatsuro MASUYAMA, Satoshi YAMAGUCHI, Koji ICHIKAWA
Life of this patent
Estimating the term…
Loading patent…
AssigneeSumitomo Chemical Company, Limited
InventorsTatsuro MASUYAMA, Satoshi YAMAGUCHI, Koji ICHIKAWA
Estimating the term…
Disclosed is a resin comprising a structural unit derived from a compound represented by formula (I) and a structural unit having an acid-labile group: wherein R1 represents a hydrocarbon group which may have a substituent, R2 each independently represent an alkyl group which may have a halogen atom, a hydrogen atom or a halogen atom, Ar represents an aromatic hydrocarbon group which may have a substituent, L1 represents a group represented by formula (L1-1), etc., L11, L13, L15 and L17 each independently represent an alkanediyl group, L12, L14, L16 and L18 each independently represent —O—, —CO—, —CO—O—, etc., * and ** are bonds, and ** represents a bond to an iodine atom.
A resin comprising a structural unit derived from a compound represented by formula (I) and a structural unit having an acid-labile group:
Dependencies are inferred from the claim text.