Imprinting apparatus and method of manufacturing product
AssigneeCanon Kabushiki Kaisha
InventorYousuke Kondo
Life of this patent
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AssigneeCanon Kabushiki Kaisha
InventorYousuke Kondo
Estimating the term…
An imprinting apparatus 100 includes a control unit 126 that controls movement of a stage 104. During a period after a pattern is formed in a first region of regions until a pattern is formed in a second region that differs from the first region of the regions, the control unit 126 does not allow the first region to pass through a facing portion that faces a discharge ports 122b. After a predetermined time has elapsed since the discharging unit 106 finally discharges a imprint material 127 to the substrate with an airstream generated along a substrate from the facing portion at the facing portion that faces the discharge ports 122b, the control unit 126 controls movement of the stage such that the regions in which the pattern is formed are allowed to pass through the facing portion.
An imprinting apparatus that forms a pattern of an imprint material in regions of a substrate by using a mold, the imprinting apparatus comprising:
An imprinting apparatus that forms a pattern of an imprint material in regions of a substrate by using a mold, the imprinting apparatus comprising:
An imprinting apparatus that forms a pattern of an imprint material in regions of a substrate by using a mold, the imprinting apparatus comprising:
An imprinting apparatus that forms a pattern of an imprint material in regions of a substrate by using a mold, the imprinting apparatus comprising:
Dependencies are inferred from the claim text.