US 2019/0291136 A1 · ULTRASONIC TRANSDUCER

Abstract

Systems and techniques are provided for an ultrasonic transducer. A substrate may include a main cavity, a secondary cavity, and a channel. The main cavity may have a greater depth than the secondary cavity. The secondary cavity may have a greater depth than channel. A first step may be formed where the main cavity and the secondary cavity overlap. A second step may be formed where the secondary cavity and the main cavity overlap. An electromechanically active device may be attached to the substrate at the first step and the second step such that a free end of the electromechanically active device is suspended over the main cavity. A membrane section may be bonded to the substrate such that the membrane covers the main cavity and the secondary cavity and is bonded to the free end of the electromechanically active.

Claims25

Dependent claims

An electromechanical transducer array comprising:

a substrate comprising two main cavities;
two electromechanically active devices attached to the substrate such that a free end of a first of the two electromechanically active device is suspended over a bottom of a first of the two main cavities and a free end of a second of the two electromechanically active device is suspended over a bottom of a second of the two main cavities;
a membrane bonded to the substrate such that a first membrane section covers the first of the two main cavities and a second membrane section covers a second of the two main cavities, the first membrane section bonded to the first of the two electromechanically active devices and the second membrane section bonded to the second of the two electromechanically active devices.

Dependencies are inferred from the claim text.

Ultrasonic transducer

Life of this patent

Ultrasonic transducer

Life of this patent

Abstract

Claims25