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US 2019/0246459 A1Published application
Emitter structure and production method
AssigneeInfineon Technologies AG
InventorsDavid Tumpold, Sebastian Anzinger, Christoph Glacer
Life of this patent
Estimating the term…
Abstract
An emitter structure includes a substrate with a membrane arrangement. The membrane arrangement includes at least one first membrane, a first heating path and a second heating path in different substrate planes. The first heating path and the second heating path are positioned with respect to one another such that a projection of the first heating path and a projection of the second heating path onto a common plane lie at least partly next to one another in the common plane.
Claims22
An emitter structure comprising:
- a substrate having a membrane arrangement comprising at least one first membrane, a first heating path and a second heating path,
- wherein the first heating path and the second heating path are arranged in different substrate planes and are positioned with respect to one another such that a projection of the first heating path and a projection of the second heating path onto a common plane lie at least partly next to one another in the common plane.
A method for producing an emitter structure, the method comprising:
- forming a membrane arrangement in a substrate comprising at least one first membrane, a first heating path and a second heating path,
- wherein the first heating path and the second heating path are arranged in different substrate planes and are positioned with respect to one another such that a projection of the first heating path and a projection of the second heating path onto a common plane lie at least partly next to one another in the common plane.
Dependencies are inferred from the claim text.