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US 2019/0245513 A1Published application
Micromechanical resonator having reduced size
AssigneeMurata Manufacturing Co., Ltd.
InventorVILLE KAAJAKARI
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Abstract
A micromechanical resonator is provided that enables a smaller total package size with an acceptable quality factor for timing applications. The MEMS resonator includes a vibration portion with a base and three or more vibrating beams extending therefrom. Moreover, the MEMS resonator includes a frame that surrounds a periphery of the vibration portion and a pair of anchor between the vibrating beams for stabilizing the vibration portion within the frame. Furthermore, support beams couple the base of the vibration portion to the pair of anchors.
Claims20
A MEMS resonator comprising:
- a vibration portion having a base with at least three vibrating beams extending from the base;
- a frame that at least partially surrounds a periphery of the vibration portion;
- at least one anchor disposed between a pair of the at least three vibrating beams and configured to stabilize the vibration portion within the frame;
- and
- at least one support beam coupling the base of the vibration portion to the at least one anchor.
2 more elements
A MEMS resonator comprising:
- a vibration portion includes a base, a pair of outer vibrating beams extending from the base, and at least one inner vibrating beam extending from the base between the pair of outer vibrating beams and extending in a direction parallel thereto;
- a pair of anchors configured to stabilize the vibration portion within a frame surrounding the vibration portion;
- and
- a pair of support beams coupling the base of the vibration portion to the pair of anchors,
- wherein a first anchor of the pair of anchors is disposed between one of the outer vibrating beams and the at least one inner vibrating beam, and a second anchor of the pair of anchors is disposed between the other of the outer vibrating beams and the at least one inner vibrating beam.
2 more elements
Dependencies are inferred from the claim text.