Filter circuit, heating circuit, and semiconductor processing apparatus

A heating circuit for heating a chuck that carries a workpiece to be processed and separately controlling temperatures of a plurality of temperature zones of the chuck, comprising:

• at least one load arranged in a one-to-one correspondence with the plurality of temperature zones of the chuck, wherein a number of the at least one load is equal to a number of temperature zones of the chuck;
• a heating source configured to provide electrical energy for heating the at least one load;
• and
• a filter circuit configured to filter the at least one load, wherein an input terminal of the filter circuit is connected to the heating source, and an output terminal of the filter circuit is connected to the at least one load, the filter circuit comprising:
• an inductor branch including a one-piece structured integrated component configured with a transformer function member and an inductor function member;
• and
• a capacitor branch connected in parallel with the inductor branch, wherein:
• the inductor function member is connected in series between the heating source and the transformer function member and configured to filter the at least one load, and
• the transformer function member is connected in parallel with the at least one load and configured to transmit a heating electrical signal output by the heating source to the at least one load.

A semiconductor processing apparatus, comprising:

• a chuck including a plurality of temperature zones, and configured to carry a workpiece to be processed;
• and
• a heating circuit configured to control temperatures of the plurality of temperature zones of the chuck, wherein the heating circuit includes:
• at least one load arranged in a one-to-one correspondence with the plurality of temperature zones of the chuck, wherein a number of the at least one load is equal to a number of temperature zones of the chuck;
• a heating source configured to provide electrical energy for heating the at least one load;
• and
• a filter circuit configured to filter the at least one load, wherein an input terminal of the filter circuit is connected to the heating source, and an output terminal of the filter circuit is connected to the at least one load, the filter circuit comprising:
• an inductor branch including a one-piece structured integrated component configured with a transformer function member and an inductor function member;
• and
• a capacitor branch connected in parallel with the inductor branch, wherein:
• the inductor function member is connected in series between the heating source and the transformer function member and configured to filter the at least one load, and
• the transformer function member is connected in parallel with the at least one load and configured to transmit a heating electrical signal output by the heating source to the at least one load.