Tool and Method of Fabricating a Self-Aligned Solid State Thin Film Battery

A method of creating a solid state electrochemical battery using a fabrication device having a plurality of chambers, the method comprising:

• depositing a first conductive electrode layer on top of a substrate;
• depositing a first polar conductor layer on top of a portion of the conductive electrode layer in a first chamber of the fabrication device;
• depositing a first solid electrolyte layer after the first polar conductor layer in a second chamber of the fabrication device;
• depositing a lithium layer after the first solid electrolyte layer in a third chamber of the fabrication device;
• depositing a second conductive electrode layer after the lithium layer;
• and
• depositing at least one passivation layer after the second conductive electrode layer in the third chamber of the fabrication device, wherein the plurality of chambers is atmosphere controlled.