Back to results
US 2019/0245133 A1Published application
Piezoelectric device
AssigneeMurata Manufacturing Co., Ltd.
InventorsKeiichi Umeda, Toshio Imanishi, Ville Kaajakari
Life of this patent
Estimating the term…
Abstract
A piezoelectric device that includes: a diaphragm; a supporting part configured to support at least a portion of an end of the diaphragm; a piezoelectric film disposed along a portion supported by the supporting part on the diaphragm, a width of the film along the supported portion being narrower than a width of the portion; a lower electrode disposed at a face of the piezoelectric film on a diaphragm side; and an upper electrode disposed on a face of the piezoelectric film on an opposite side to the diaphragm.
Claims12
A piezoelectric device comprising:
- a substrate;
- a plurality of transducer beams, each of the plurality of transducer beams comprising:
- a piezoelectric layer;
- a first electrode layer;
- and
- a second electrode layer, the first and second electrode layers sandwiching the piezoelectric layer, wherein
- each of the plurality of transducer beams have a beam base, a beam end, and a beam body between the beam base and the beam end,
- the plurality of transducer beams are connected in a cantilever arrangement over the substrate with each of the beam bases of the plurality of transducer beams attached to the substrate, and
- each of the beam ends of the plurality of transducer beams converge towards a single point such that at least two of the beam ends face each other and are separated by a gap.
6 more elements
Dependencies are inferred from the claim text.