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US 2019/0245100 A1Published application
Method and optoelectronic structure providing polysilicon photonic devices with different optical properties in different regions
AssigneesMicron Technology, Inc., Massachusetts Institute of Technology
InventorsRoy Meade, Karan Mehta, Efraim Megged, Jason Orcutt, Milos Popovic, Rajeev Ram, Jeffrey Shainline, Zvi Sternberg, Vladimir Stojanovic, Ofer Tehar-Zahav
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Abstract
Method and structural embodiments are described which provide an integrated structure using polysilicon material having different optical properties in different regions of the structure.
Claims17
1-21. (canceled)
An integrated structure comprising:
- a substrate;
- an optical isolation region formed in the substrate;
- a first photonic device over the substrate, the first photonic device formed of a first polysilicon material;
- and
- a second photonic device over and vertically aligned with the optical isolation region, the second photonic device formed of a second polysilicon material different from the first polysilicon material, wherein the first polysilicon material and second polysilicon material are coplanar in the integrated structure and have different optical properties.
2 more elements
An integrated structure comprising:
- a substrate
- an optical isolation region formed in the substrate;
- a first photonic device over the substrate, the first photonic device comprising a first polysilicon material;
- and
- a second photonic device over and vertically aligned with the optical isolation region, the second photonic device formed of a second polysilicon material different from the first polysilicon material, wherein the second polysilicon material is formed by implanting a region of the first polysilicon material with silicon to create an amorphous silicon region and annealing the annealing the amorphous silicon region to create the second polysilicon material,
- wherein the second polysilicon material is coplanar with the first polysilicon material and has different optical properties from the first polysilicon material.
3 more elements
Dependencies are inferred from the claim text.