Single electron transistors
AssigneeIntel Corporation
InventorHubert C. George
Life of this patent
Estimating the term…
Loading patent…
AssigneeIntel Corporation
InventorHubert C. George
Estimating the term…
Disclosed herein are single electron transistor (SET) devices, and related methods and devices. In some embodiments, a SET device may include: first and second source/drain (S/D) electrodes disposed on a side face of a first insulating support and on a side face of a second insulating support, respectively; an island disposed between the first and second S/D electrodes and extending into an area between the first and second insulating supports. In some embodiments, a SET device may include: first and second S/D electrodes disposed on a substrate; an island disposed in an area between the first and second S/D electrodes; first and second portions of dielectric disposed between the island and the first and second S/D electrodes, respectively; and a third portion of dielectric disposed between the substrate and the island.
A device, comprising:
A method of manufacturing a single electron transistor (SET device), comprising:
(canceled)
20-23. (canceled)
A computing device, comprising:
Dependencies are inferred from the claim text.