Solid-state image pickup device and method of manufacture, and electronic device

A method of manufacturing a solid-state image pickup device including at least a first layer having a first refractive index, a second layer having a second refractive index, and a third layer having a third refractive index, which are laminated, the solid-state image pickup device including:

• a multilayer film filter having a laminated structure in which the third layer is sandwiched between the first layer and the second layer, wherein
• the third layer is formed such that at least two types of dielectrics having different refractive indexes mixedly exist and an effective refractive index is determined according to a ratio of the mixture,
• the ratio of the mixture of the two types of dielectrics is adjusted across a surface of the third layer such that the effective refractive index of the third layer gradually increases from a portion in which an incident angle of light emitted onto the multilayer film filter is small toward a portion in which the incident angle of light is large, and
• the method comprises steps of:
• embedding, in a first dielectric serving as a base material having a predetermined refractive index, a second dielectric having a refractive index different from the refractive index of the first dielectric;
• and
• forming, using the second dielectric, a structure having a size smaller than a transmission wavelength of light transmitted through the multilayer film filter.

An electronic device, comprising:

• a solid-state image pickup device including at least a first layer having a first refractive index, a second layer having a second refractive index, and a third layer having a third refractive index, which are laminated, the solid-state image pickup device including:
• a multilayer film filter having a laminated structure in which the third layer is sandwiched between the first layer and the second layer, wherein
• the third layer is formed such that at least two types of dielectrics having different refractive indexes mixedly exist and an effective refractive index is determined according to a ratio of the mixture, and
• the ratio of the mixture of the two types of dielectrics is adjusted across a surface of the third layer such that the effective refractive index of the third layer gradually increases from a portion in which an incident angle of light emitted onto the multilayer film filter is small toward a portion in which the incident angle of light is large.