Hybrid copper structure for advance interconnect usage
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsHsiang-Wei Liu, Tai-I Yang, Cheng-Chi Chuang, Tien-Lu Lin
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AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsHsiang-Wei Liu, Tai-I Yang, Cheng-Chi Chuang, Tien-Lu Lin
Estimating the term…
The present disclosure, in some embodiments, relates to an integrated chip. The integrated chip includes a dielectric structure over a substrate, and a first interconnect structure arranged within the dielectric structure. A lower interconnect structure is arranged within the dielectric structure. The first interconnect structure and the lower interconnect structure comprise one or more different conductive materials. The first interconnect structure continuously extends from directly over a topmost surface of the lower interconnect structure facing away from the substrate to along opposing outer sidewalls of the lower interconnect structure.
An integrated chip, comprising:
An integrated chip, comprising:
An integrated chip, comprising:
Dependencies are inferred from the claim text.