Transfer device

Abstract

A transfer device for transferring a plurality of micro LED dies is provided. The transfer device includes a carrier plate, a plurality of deformable components, and a plurality of transfer heads. The plurality of deformable components are disposed on the carrier plate. The plurality of transfer heads are respectively disposed on the plurality of deformable components. Each of the transfer heads includes a plurality of micro protrusions arranged in an array on a side away from the corresponding one deformable component. Deformation of the deformable components leads to deformation of the transfer heads, such that a number of the micro protrusions in contact with the micro LED dies is decreased. Accordingly, the transfer device can easily release the micro LED dies.

Dependencies are inferred from the claim text.