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US 2019/0244831 A1Published application
Multilayer batch microfabricated magnetic shielding
AssigneeThe Regents of the University of California
InventorsRobert N. CANDLER, Jimmy Chen-Yen WU, Ling LI, Jere C. HARRISON
Life of this patent
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Abstract
A microfabrication process includes: (1) etching a shield pattern into a substrate; (2) forming a set of shielding layers on the substrate and in the shield pattern, wherein the shielding layers include n+1 magnetic layers and n spacing layers, n is 0 or an integer that is 1 or greater than 1, and each spacing layer is disposed between a pair of magnetic layers; and (3) planarizing the substrate to expose edges of the shielding layers.
Claims20
A microfabrication process comprising:
- etching a shield pattern into a substrate;
- forming a set of shielding layers on the substrate and in the shield pattern, wherein the shielding layers include n+1 magnetic layers and n spacing layers, n is 0 or an integer that is 1 or greater than 1, and each spacing layer is disposed between a pair of magnetic layers;
- and
- planarizing the substrate to expose edges of the shielding layers.
1 more element
A shielded device comprising:
- a shielded enclosure including a first portion and a second portion,
- wherein the first portion of the shielded enclosure includes a first substrate defining a first trench, and a first plurality of shielding layers in the first trench, and
- wherein the second portion of the shielded enclosure is bonded to the first portion of the shielded enclosure, and the second portion of the shielded enclosure includes a second substrate defining a second trench, and a second plurality of shielding layers in the second trench;
- and
- a device disposed between the first portion and the second portion of the shielded enclosure, and enclosed by the first plurality of shielding layers and the second plurality of shielding layers.
2 more elements
A fabrication process comprising:
- providing a structure including a device and having a non-planar surface;
- and
- forming a plurality of shielding layers on the non-planar surface, wherein the shielding layers include n+1 magnetic layers and n spacing layers, n is an integer that is 1 or greater than 1, and each spacing layer is disposed between a pair of magnetic layers.
Dependencies are inferred from the claim text.