Microwave output device and plasma processing apparatus

A microwave output device comprising:

• a microwave generation unit that generates a microwave having a center frequency, a power, and a bandwidth respectively corresponding to a set frequency, a set power, and a set bandwidth designated from a controller;
• an output that outputs a microwave propagating from the microwave generation unit;
• a first directional coupler that outputs a part of a travelling wave propagating toward the output from the microwave generation unit;
• and
• a first measurement unit that determines a first measured value indicating a power of the travelling wave at the output on a basis of the part of the travelling wave output from the first directional coupler,
• wherein the first measurement unit includes
• a first spectrum analysis unit that obtains a plurality of digital values respectively indicating power levels of a plurality of frequency components in the part of the travelling wave through spectrum analysis, and
• a first processing unit configured to determine the first measured value by obtaining a root mean square of a plurality of products obtained by multiplying a plurality of first correction coefficients, which are preset to correct the plurality of digital values obtained by the first spectrum analysis unit to the power levels of the plurality of frequency components of the travelling wave at the output unit, by the plurality of digital values, respectively.

A microwave output device comprising:

• a microwave generation unit that generates a microwave having a center frequency, a power, and a bandwidth respectively corresponding to a set frequency, a set power, and a set bandwidth designated from a controller;
• an output that outputs a microwave propagating from the microwave generation unit;
• a first directional coupler that outputs a part of a travelling wave propagating toward the output from the microwave generation unit;
• and
• a first measurement unit that determines a first measured value indicating a power of a travelling wave at the output on a basis of the part of the travelling wave output from the first directional coupler,
• wherein the first measurement unit includes
• a first spectrum analysis unit that obtains a plurality of digital values respectively indicating power levels of a plurality of frequency components in the part of the travelling wave through spectrum analysis, and
• a first processing unit configured to determine the first measured value by obtaining a product of a root mean square of the plurality of digital values obtained by the first spectrum analysis unit and a predefined first correction coefficient.