Method of processing a surface by means of a particle beam

A method for processing a surface, having an initial topology, using a particle beam, the method comprising:

• processing the surface using the particle beam, wherein the particle beam is incident on the surface at a first angle with respect to the surface in accordance with a target topology of the surface;
• simulating the processing of the topology of the surface at a second angle after processing the topology of the surface at the first angle;
• and
• subsequently processing starting from the simulated topology of the surface using the particle beam, wherein the particle beam is incident on the surface at a second angle with respect to the surface in accordance with a target topology of the surface, wherein the second angle differs from the first angle,
• wherein the particle current density and/or the particle current flow of the particle beam during the processing operations of the surface are substantially the same, and/or wherein only the angle of the particle beam with respect to the surface is changed, wherein further parameters of the particle beam, of the particle beam characteristic and/or of the particle beam generation are kept substantially constant or only exhibit deviations below a tolerance value.