Topological scanning method and system
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsSheng-Hsiang CHUANG, Becky LIAO, Cheng-Kang HU, Shou-Wen KUO, Jiun-Rong PAI, Hsu-Shui LIU
Life of this patent
Estimating the term…
Loading patent…
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsSheng-Hsiang CHUANG, Becky LIAO, Cheng-Kang HU, Shou-Wen KUO, Jiun-Rong PAI, Hsu-Shui LIU
Estimating the term…
A method for scanning and analyzing a surface, the method comprising: receiving a piece of equipment with a target surface for inspection; receiving an input from a user; determining at least one scan parameter based on the user input; scanning the target surface using an optical detector in accordance with the at least one scan parameter; generating an image of the target surface; correcting the image of the target surface to remove at least one undesired feature to generate a corrected image based on the at least one scan parameter; and analyzing the corrected image to determine at least one geometric parameter of the target surface.
A method for scanning and analyzing a surface, the method comprising:
An inspection system for scanning and analyzing a surface comprising:
A non-transitory computer readable medium storing computer-executable instructions that when executed by a computer perform a method for scanning and analyzing a surface, the method comprising:
Dependencies are inferred from the claim text.