Resin composition

An amido-phenol based dissolution accelerator as represented by any one of general formulae (3) to (5) given below:

• wherein in general formulae (3) to (5), m is an integer of 1 to 4;
• X is a monovalent organic group that has an alkyl group containing 2 to 20 carbon atoms and bonding directly to the carbonyl carbon in general formulae (3) to (5) or a monovalent organic group that has —(YO)n—;
• Y is an alkylene group containing 1 to 10 carbon atoms;
• n is an integer of 1 to 20;
• Z is a single bond, a hydrogen atom, an alkoxy group, —O—, —SO2—, —C(CF3)2—, —O—R1—O—, —C(═O)—, —C(═O)O—R2—OC(═O)—, —C(═O)NH—R3—NHC(═O)—, or a monovalent to tetravalent hydrocarbon group containing 1 to 20 carbon atoms;
• and R1 to R3 are each a divalent hydrocarbon group containing 1 to 20 carbon atoms;
• m being 2 when Z is a single bond.

An aromatic amido acid based dissolution accelerator as represented by any one of general formulae (6) to (10) given below:

• wherein in general formulae (6) to (10), m is an integer of 1 to 4;
• U is a monovalent organic group that has an alkyl group containing 2 to 20 carbon atoms and bonding directly to the amide nitrogen in general formulae (6) to (10) or a monovalent organic group that has —(YO)n—;
• Y is an alkylene group containing 1 to 10 carbon atoms;
• n is an integer of 1 to 20;
• Z is a single bond, a hydrogen atom, an alkoxy group, —O—, —SO2—, —C(CF3)2—, —O—R1—O—, —C(═O)—, —C(═O)O—R2—OC(═O)—, —C(═O)NH—R3—NHC(═O)—, or a monovalent to tetravalent hydrocarbon group containing 1 to 20 carbon atoms;
• R1 to R3 are each a divalent hydrocarbon group containing 1 to 20 carbon atoms;
• and R4 and R5 are each —C(CH3)2—, —C(CF3)2—, —O— or —S—;
• m being 2 when Z is a single bond.

A cured film comprising an alkali-soluble resin (a), a benzoxazole compound as represented by any one of general formulae (11) to (13) given below, and/or an imide compound as represented by any one of general formulae (14) to (16) given below:

• wherein in general formulae (11) to (13), W is a monovalent organic group that has an alkyl group containing 2 to 20 carbon atoms and bonding directly to a carbon atom in the oxazole ring in general formulae (11) to (13) or a monovalent organic group that has —(YO)n—;
• and in general formulae (14) to (16), V is a monovalent organic group that has an alkyl group containing 2 to 20 carbon atoms and bonding directly to a nitrogen atom in the imide ring in general formulae (14) to (16) or a monovalent organic group that has —(YO)n—;
• wherein m is an integer of 1 to 4;
• Y is an alkylene group containing 1 to 10 carbon atoms;
• and n is an integer of 1 to 20;
• Z is a single bond, a hydrogen atom, an alkoxy group, —O—, —SO2—, —C(CF3)2—, —O—R1—O—, —C(═O)—, —C(═O)O—R2—OC(═O)—, —C(═O)NH—R3—NHC(═O)—, or a monovalent to tetravalent hydrocarbon group containing 1 to 20 carbon atoms;
• R1 to R3 are each a divalent hydrocarbon group containing 1 to 20 carbon atoms;
• and R4 and R5 are each —C(CH3)2—, —C(CF3)2—, —O— or —S—;
• m being 2 when Z is a single bond.