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US 2019/0241695 A1Published application
Composition and pattern-forming method
AssigneeJsr Corporation
InventorsYuji NAMIE, Shinya MINEGISHI, Tomoki NAGAI, Takuo SONE
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Abstract
A directed self-assembling composition for pattern formation includes a block copolymer. The block copolymer includes a polystyrene block having a styrene unit, and a polyalkyl (meth)acrylate block having an alkyl (meth)acrylate unit. The block copolymer has a group that is bound to at least one end of a main chain of the block copolymer and that includes a hetero atom.
Claims15
1-10. (canceled)
11:
- A composition comprising:
- a block copolymer comprising:
- a polystyrene block comprising a styrene unit;
- and
- a polyalkyl (meth)acrylate block comprising an alkyl (meth)acrylate unit;
- and
- a solvent,
- the block copolymer comprising an organic group that is bound to at least one end of a main chain of the block copolymer and that comprises a hetero atom,
- wherein the organic group included in the block copolymer comprises a phosphorus atom, a tin atom, or a combination thereof, or is represented by formula (1):
- wherein, in the formula (1), R1 represents a divalent organic group having 1 to 30 carbon atoms;
- and R2 represents a hydrogen atom, an aliphatic linear hydrocarbon group having 1 to 30 carbon atoms, an alicyclic hydrocarbon group having 3 to 30 carbon atoms, or a group in which the aliphatic linear hydrocarbon group having 1 to 30 carbon atoms or the alicyclic hydrocarbon group having 3 to 30 carbon atoms comprises a hetero atom between adjacent two carbon atoms.
8 more elements
12:
- The composition of claim 11, wherein the block copolymer is a diblock copolymer or a triblock copolymer.
13:
- The composition of claim 11, wherein the block copolymer is a diblock copolymer.
14:
- The composition of claim 11, wherein the organic group is bound to an end of the main chain of the polyalkyl (meth)acrylate block.
15:
- The composition of claim 11, wherein the block copolymer is a diblock copolymer and the organic group is bound to an end of the main chain of the polyalkyl (meth)acrylate block.
16:
- The composition of claim 11, wherein the alkyl (meth)acrylate unit is a methyl methacrylate unit.
17:
- The composition of claim 11, wherein a molar ratio of styrene units to alkyl (meth)acrylate units in the block copolymer is no less than 10/90 and no greater than 90/10.
18:
- The composition of claim 11, wherein the organic group included in the block copolymer is derived from an epoxy compound.
19:
- The composition of claim 11, wherein R1 represents an aliphatic linear hydrocarbon group having 2 to 30 carbon atoms and optionally comprising a hetero atom between adjacent two carbon atoms, an alicyclic hydrocarbon group having 3 to 30 carbon atoms and optionally comprising a hetero atom between adjacent two carbon atoms, or an aromatic hydrocarbon group having 6 to 30 carbon atoms and optionally comprising a hetero atom between adjacent two carbon atoms.
20:
- The composition of claim 11, wherein the organic group included in the block copolymer is represented by the formula (1).
21:
- The composition of claim 11, further comprising a surfactant.
22:
- A pattern-forming method comprising:
- providing a directed self-assembling film having a phase separation structure on a substrate using the composition according to claim 11;
- and
- removing a part of phases of the directed self-assembling film.
1 more element
23:
- The pattern-forming method according to claim 22,
- wherein the method further comprises before providing the directed self-assembling film:
- providing an underlayer film on the substrate;
- and
- forming a prepattern on the underlayer film,
- wherein the directed self-assembling film is provided in a region compartmentalized by the prepattern on the underlayer film, and
- wherein the method further comprises after providing the directed self-assembling film,
- removing the prepattern.
5 more elements
24:
- The pattern-forming method according to claim 22, wherein the pattern obtained is a line-and-space pattern or a hole pattern.