Method for manufacturing porous glass fine particle body, manufacturing apparatus for porous glass fine particle body, and method for manufacturing glass preform
AssigneeFujikura Ltd.
InventorNobutoshi Sato
Life of this patent
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Abstract
A method for manufacturing a porous glass fine particle body including: forming a deposit layer of glass fine particles, generated from raw material gas including a silicon-containing organic compound, on a rotary starting member; supplying the raw material gas to a burner; switching the raw material gas to purge gas; supplying the purge gas to the burner at a first flow rate when the raw material gas is discharged from inside the burner; and switching the first flow rate to a second flow rate smaller than the first flow rate.
Claims11
A method for manufacturing a porous glass fine particle body, the method comprising:
- forming a deposit layer of glass fine particles, generated from raw material gas including a silicon-containing organic compound, on a rotary starting member;
- supplying the raw material gas to a burner;
- switching the raw material gas to purge gas;
- supplying the purge gas to the burner at a first flow rate when the raw material gas is discharged from inside the burner;
- and
- switching the first flow rate to a second flow rate smaller than the first flow rate.
A manufacturing apparatus for a porous glass fine particle body, the apparatus comprising:
- a burner;
- a raw material gas supply line that supplies raw material gas including a silicon-containing organic compound to the burner;
- a purge gas supply line that supplies purge gas to the burner;
- a switching mechanism that switches connection and shutoff of the raw material gas supply line and the purge gas supply line to and from the burner;
- and
- a control mechanism that:
- is disposed on an upstream side from the switching mechanism in the purge gas supply line,
- controls a supply amount of the purge gas, and
- sets a flow rate of the purge gas supplied to the burner to a first flow rate when the raw material gas is discharged from inside the burner, and thereafter switches the first flow rate to a second flow rate smaller than the first flow rate.
Dependencies are inferred from the claim text.