US 2019/0241376 A1 · SYSTEM FOR LOADING AND UNLOADING A SUBSTRATE, METHOD FOR LOADING A SUBSTRATE, AND METHOD FOR UNLOADING A SUBSTRATE

Abstract

The disclosed system for loading and unloading the substrate includes: a substrate rotation apparatus having a first rotation position and a second rotation position with a difference in rotation angle of 90 degrees, wherein the substrate rotation apparatus includes two layers of sucker assemblies, each of which includes a plate body, a plurality of support suction tubes arranged on the plate body, and first suckers connected with tops of respective support suction tubes respectively, and there are gaps, for inserting the substrate therein, between respective first suckers of a lower layer of sucker assembly, and a plate body of an upper layer of sucker assembly; and a mechanical hand including a plurality of mechanical fingers capable of holding two halves of the substrate, both of which are arranged in a length direction of the mechanical fingers, and joined together into an entire substrate.

Claims14

Dependent claims

A system for loading and unloading a substrate, comprising:

a substrate rotation apparatus having a first rotation position and a second rotation position with a difference in rotation angle of 90 degrees, wherein the substrate rotation apparatus comprises two layers of sucker assemblies, each of which comprises a plate body, a plurality of support suction tubes arranged on the plate body, and first suckers connected with tops of respective support suction tubes respectively, and there are gaps, for inserting the substrate therein, between respective first suckers of a lower layer of sucker assembly, and a plate body of an upper layer of sucker assembly;
and
a mechanical hand comprising a plurality of mechanical fingers capable of holding two halves of the substrate, both of which are arranged in a length direction of the mechanical fingers, and joined together into an entire substrate.

A method for loading a substrate, the method comprising:

controlling a mechanical hand to take two halves of the substrate sequentially out of a substrate storage chuck, and placing the two halves of the substrate respectively on two layers of sucker assemblies of a substrate rotation apparatus at a first rotation position;
controlling the substrate rotation apparatus to be switched to a second rotation position;
controlling the mechanical hand to take the two halves of the substrate sequentially out of a lower layer of sucker assembly and an upper layer of sucker assembly of the substrate rotation apparatus at the second rotation position, so that the two halves of the substrate are arranged in a length direction of mechanical fingers, and joined together into an entire substrate, on the mechanical fingers;
and
controlling the mechanical hand to convey the two halves of the substrate joined together into the entire substrate to a substrate machining device.

2 more elements

A method for unloading a substrate, the method comprising:

controlling a mechanical hand to take two halves of the substrate joined together into an entire substrate out of a substrate machining device, and placing the two halves of the substrate respectively on two layers of sucker assemblies of a substrate rotation apparatus at a second rotation position;
controlling the substrate rotation apparatus to be switched to a first rotation position;
and
controlling the mechanical hand to take the two halves of the substrate sequentially out of the two layers of sucker assemblies of the substrate rotation apparatus at the first rotation position, and conveying the two halves of the substrate respectively into a substrate storage chuck.

1 more element

Dependencies are inferred from the claim text.

System for loading and unloading a substrate, method for loading a substrate, and method for unloading a substrate

Life of this patent

System for loading and unloading a substrate, method for loading a substrate, and method for unloading a substrate

Life of this patent

Abstract

Claims14