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AssigneeHitachi High-Technologies Corporation
InventorsMotohiro TAKAHASHI, Masaki MIZUOCHI, Shuichi NAKAGAWA, Hironori OGAWA, Takanori KATO
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The present invention relates to a charged particle beam device capable of suppressing table deformation caused by movement of a rolling element of a guide with a simple configuration, and a strain isolation guide structure, a stage using the guide structure, and a charged particle beam device using the stage are proposed, the strain isolation guide structure being characterized in that, in a sample stage including a linear guide including a carriage (201), a rolling element, and a guide rail (202), and a table (105), the carriage (201) and the table (105) are connected via an adapter (401) as an elastically deformable member.
A sample stage including a table that supports a sample, a guide rail that guides the table in a specific direction, and a carriage that supports the table and moves along the guide rail together with the table by movement accompanying rotation of a rolling element included inside the carriage, the sample stage comprising:
A sample stage including a table that supports a sample, a guide rail that guides the table in a specific direction, and a carriage that supports the table and moves along the guide rail together with the table by movement accompanying rotation of a rolling element included inside the carriage, wherein
Dependencies are inferred from the claim text.