High purity metallic top coat for semiconductor manufacturing components
AssigneeApplied Materials, Inc.
InventorsJennifer Y. Sun, Vahid Firouzdor
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Abstract
An article comprises a component for a manufacturing chamber, a coating on the component, and an anodization layer formed on the coating. The anodization layer has a thickness of about 2-10 mil, comprises a low porosity layer portion having a density of greater than 99% and a porous columnar layer portion having a higher porosity than the low porosity layer portion. The porous columnar layer portion comprises a plurality of columnar nanopores having a diameter of about 10-50 nm.
Claims20
An article comprising:
- a component for a manufacturing chamber;
- a coating on the component;
- and
- an anodization layer formed on the coating, the anodization layer having a thickness of about 2-10 mil, wherein the anodization layer comprises a low porosity layer portion having a density of greater than 99% and a porous columnar layer portion having a higher porosity than the low porosity layer portion and comprising a plurality of columnar nanopores having a diameter of about 10-50 nm.
An article comprising a component of a manufacturing chamber, a coating on a surface of the component, and an anodization layer on the coating, the article having been manufactured by a process comprising:
- depositing a coating onto the surface of the article;
- and
- anodizing the coating to form the anodization layer, the anodization layer having a thickness of about 2-10 mil, wherein anodizing the coating comprises:
- applying a first current density during a start of the anodizing to form a low porosity layer portion of the anodization layer, the low porosity layer portion having a density of greater than about 99%;
- and
- applying a second current density that is lower than the first current density during a remainder of the anodizing to form a porous columnar layer portion of the anodization layer, the porous columnar layer portion having a higher porosity than the low porosity layer portion and comprising a plurality of columnar nanopores having a diameter of about 10-50 nm.
A method comprising:
- cold spray coating a metal powder onto an article to form a coating on the article;
- and
- anodizing the coating to form an anodization layer having a thickness of about 2-10 mil, wherein anodizing the coating comprises:
- applying a first current density during a start of the anodizing to form a low porosity layer portion of the anodization layer, the low porosity layer portion having a density of greater than 99%;
- and
- applying a second current density that is lower than the first current density during a remainder of the anodizing to form a porous columnar layer portion of the anodization layer over the low porosity layer portion, the porous columnar layer portion comprising a plurality of columnar nanopores having a diameter of about 10-50 nm,
Dependencies are inferred from the claim text.