Miniaturized circuit and method of making the same
AssigneeSiward Crystal Technology Co., Ltd.
InventorsYen-Hao TSENG, Shih-Ying HUANG, Yu-Hsuan PENG, Wei-Chih HSU, Wei-Lin WANG, Wen-Kuan HUANG
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AssigneeSiward Crystal Technology Co., Ltd.
InventorsYen-Hao TSENG, Shih-Ying HUANG, Yu-Hsuan PENG, Wei-Chih HSU, Wei-Lin WANG, Wen-Kuan HUANG
Estimating the term…
A method for making a miniaturized circuit includes: depositing a bottom metal layer including a first metal on a substrate; forming a patterned photoresist layer on the bottom metal layer to expose a first portion of the bottom metal layer and to cover a second portion thereof; plating a middle circuit pattern including a second metal on the bottom metal layer to cover the first portion of the bottom metal layer; plating a top circuit pattern including a third metal different from the first metal onto the middle circuit pattern to cover the middle circuit pattern; removing the patterned photoresist layer; and etching the second portion of the bottom metal layer with an etchant, so as to pattern the bottom metal layer into a bottom circuit pattern.
A method for making a miniaturized circuit, comprising the steps of:
A miniaturized circuit comprising:
Dependencies are inferred from the claim text.