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US 2019/0174614 A1Published application
Extreme ultraviolet light generation device
AssigneeGigaphoton Inc.
InventorsFumio IWAMOTO, Tsukasa HORI, Toshiyuki HIRASHITA
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Abstract
An extreme ultraviolet light generation device may include a chamber in which a target is irradiated with laser light and extreme ultraviolet light is generated, and a target supply unit configured to eject a target into the chamber. The target supply unit may be provided with a nozzle member including an ejection face having an ejection port configured to eject the target into the chamber. An angle θ1 defined by the ejection face and the gravity axis may satisfy a condition of “0 degrees<θ1<90 degrees”.
Claims12
An extreme ultraviolet light generation device comprising:
- a chamber in which a target is irradiated with laser light and extreme ultraviolet light is generated;
- and
- a target supply unit configured to eject a target into the chamber,
- the target supply unit including:
- an ejection face having an ejection port configured to eject the target into the chamber;
- a substrate portion having a base face exposed to an inside of the chamber;
- and
- a protruding portion having the ejection face at a tip of the protruding portion, the protruding portion being formed to protrude from the base face, the protruding portion having a truncated cone shape,
- the protruding portion including a first flow path formed on a peripheral face of the protruding portion, the first flow path being formed to be inclined from an outer end of the ejection face in an inclination direction of the ejection face,
- an angle θ1 defined by the ejection face and a gravity axis satisfying a condition of “0 degrees<θ1<90 degrees”, and
- an angle θ2 defined by the first flow path and the gravity axis satisfying a condition of “θ1<θ2<90 degrees”.
8 more elements
Dependencies are inferred from the claim text.