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US 2019/0172966 A1Published application
Nanostructured substrates for improved lift-off of iii-v thin films
AssigneeArizona Board of Regents on behalf of Arizona State University
InventorsAlan Chin, Cun-Zheng Ning
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Abstract
Reusable nanostructured substrates for forming semiconductor thin films, such as those used in solar cells, are configured with nanopillars to permit improved lift-off of thin films.
Claims14
A method for preparing thin film materials, the method comprising:
- forming a plurality of nanopillars on a crystalline semiconductor substrate;
- growing a first thin film atop the plurality of nanopillars to form a nanostructured substrate;
- separating the first thin film from the plurality of nanopillars via a first lift-off process;
- re-using the nanostructured substrate to grow a second thin film atop the plurality of nanopillars;
- and
- separating the second thin film from the plurality of nanopillars via a second lift-off process.
3 more elements
A method for preparing thin film materials, the method comprising:
- depositing a plurality of nanospheres on a top surface of a crystalline semiconductor substrate;
- forming a plurality of nanopillars in the crystalline semiconductor substrate via a first etching;
- removing the plurality of nanospheres from the crystalline semiconductor substrate;
- growing a first thin film atop the plurality of nanopillars to form a nanostructured substrate;
- separating the first thin film from the plurality of nanopillars via a first lift-off process;
- re-using the nanostructured substrate to grow a second thin film atop the plurality of nanopillars;
- and
- separating the second thin film from the plurality of nanopillars via a second lift-off process.
5 more elements
Dependencies are inferred from the claim text.