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US 2019/0172958 A1Published application
The infrared sensor and manufacturing method thereof
AssigneeIndustrial Technology Research Institute
InventorsFeng-Chia Hsu, Shing-Cheng Chang, Peng-Jen Chen, Chung-Yuan Su
Life of this patent
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Abstract
An infrared sensor including a substrate, an infrared absorption layer and a concave is provided. The infrared absorption layer is formed on a substrate and has a sensing surface. The concave extends toward the substrate from a sensing surface of the infrared absorption layer.
Claims14
An infrared sensor, comprising:
- a substrate:
- an infrared absorption layer formed on the substrate and having a sensing surface;
- and
- a concave extending towards the substrate from the sensing surface of the infrared absorption layer.
1 more element
A manufacturing method of an infrared sensor, comprising:
- providing a substrate and an infrared absorption layer, wherein the infrared absorption layer is formed on the substrate and has a sensing surface;
- and
- forming a concave extending towards the substrate from the sensing surface of the infrared absorption layer.
Dependencies are inferred from the claim text.