Passivated Emitter and Rear Contact Solar Cell
AssigneeNederlandse Organisatie voor toegepast-natuurwetenschappelijk onderzoek TNO
InventorsJohn ANKER, Evert Eugene BENDE, Lambert Johan GEERLIGS, Maciej Krzyszto STODOLNY
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Abstract
Solar cell and method of manufacturing a solar cell. The solar cell has a silicon substrate (2) and a layer (4) disposed on a substrate side (2a) of the silicon substrate (2). It further has a contact structure (6) extending through the layer (4) from a cell side (1a) of the solar cell (1) to the silicon substrate (2). The layer (4) is composed of a polycrystalline silicon layer (8) and a tunnel oxide layer (10) interposed between the polycrystalline silicon layer (8) and the silicon substrate (2).
Claims14
A solar cell, comprising a silicon substrate and a layer disposed on a substrate side of the silicon substrate, and further comprising a contact structure extending through the layer from a cell side of the solar cell to the silicon substrate,
- wherein the layer comprises a polycrystalline silicon layer and a tunnel oxide layer interposed between the polycrystalline silicon layer and the silicon substrate.
Method A method of manufacturing a solar cell, comprising the steps of:
- a) providing a silicon substrate;
- b) depositing a tunnel oxide layer on a substrate side of the silicon substrate;
- c) depositing a polycrystalline silicon layer on the tunnel oxide layer;
- and
- d) providing a contact structure extending from a cell side of the silicon substrate through the polycrystalline silicon layer and tunnel oxide layer to the silicon substrate.
Dependencies are inferred from the claim text.