Exhaust device, processing apparatus, and exhausting method

A processing apparatus comprising:

• a processing vessel including a processing space of a vacuum atmosphere for applying a process to a workpiece, and an exhaust space;
• and
• an exhaust device including
• an exhaust mechanism including a first blade unit and a second blade unit provided in the exhaust space, the first blade unit and the second blade unit being arranged coaxially with a periphery of the workpiece, at least one of the first blade unit and the second blade unit being rotatable;
• and
• an exhaust unit communicating with the exhaust space, the exhaust unit being provided at a downstream side of the exhaust mechanism and being configured to exhaust gas in the processing vessel.

A method of exhausting gas in a processing vessel including a processing space of a vacuum atmosphere for applying a process to a workpiece, and an exhaust space;

• the method comprising:
• rotating at least one of a first blade unit and a second blade unit, the first blade unit and the second blade unit being provided in the exhaust space and arranged coaxially with a periphery of the workpiece;
• causing an exhaust unit communicating with the exhaust space to exhaust gas in the processing vessel, the exhaust unit being provided at a downstream side of the first blade unit and the second blade unit;
• and
• controlling a rotational speed of the at least one of the first blade unit and the second blade unit, based on a predetermined condition.