Aligning method for use in semiconductor inspection apparatus

An aligning method for use in a semiconductor inspection apparatus, wherein the semiconductor inspection apparatus comprises a stage and a touch-control screen, wherein the aligning method comprise:

• displaying an image of a device under test (DUT) supported by the stage on the touch-control screen;
• detecting a first touch point and a second touch point occurred on the touch-control screen, and defining a first straight line according to the first touch point and the second touch point;
• detecting a third touch point and a fourth touch point occurred on the touch-control screen, and defining a second straight line according to the third touch point and the fourth touch point;
• calculating an included angle defined by the first straight line and the second straight line;
• and
• rotating the stage according to the included angle.

An aligning method for use in a semiconductor inspection apparatus, wherein the semiconductor inspection apparatus comprises a stage and a touch-control screen, wherein the aligning method comprises:

• displaying an image of a device under test (DUT) supported by the stage on the touch-control screen;
• detecting a first touch track occurred on the touch-control screen, and defining a first straight line according to the first touch track;
• detecting a second touch track occurred on the second-touch screen, and defining a second straight line according to the second touch track;
• calculating an included angle defined by the first straight line and the second straight line;
• and
• rotating the stage according to the included angle.