Mark detection apparatus, mark detection method, measurement apparatus, exposure apparatus, exposure method and device manufacturing method

A mark detection apparatus that is configured to detect a mark formed in a mark area of an object,

• the mark detection apparatus comprising:
• a first optical system that is configured to emit a first measurement light to the mark area;
• a second optical system that is configured to deflect a second measurement light including a diffracted light generated by an irradiation of the first measurement light to the mark area from the first optical system and to irradiate the mark area with the deflected second measurement light as a third measurement light;
• and
• a light receiver that is configured to optically receive a fourth measurement light including a diffracted light generated by an irradiation of the third measurement light to the mark area from the second optical system.

A mark detection apparatus that is configured to detect a mark formed in a mark area of an object,

• the mark detection apparatus comprising:
• a first optical system that is configured to emit a measurement light to the mark area, the measurement light including a plurality of light components having different wavelengths, respectively;
• and
• a light receiver that is configured to optically receive at least one part of the measurement light through the mark area,
• the light receiver having a plurality of light receiving surfaces for detecting the plurality of light components, respectively.

A mark detection apparatus that is configured to detect a mark formed in a mark area of an object,

• the mark detection apparatus comprising:
• a first optical system that is configured to emit a measurement light to the mark area, the measurement light including a plurality of light components having different wavelengths, respectively;
• a second optical system that is configured to align a traveling direction of the light component having a first wavelength in the measurement light from the mark area and a traveling direction of the light component having a second wavelength different from the first wavelength in the measurement light from the mark area and to emit the light component having the first wavelength and the light component having the first wavelength;
• and
• a light receiver that is configured to optically receive at least one part of the measurement light from the second optical system.

A mark detection method of detecting a mark formed in a mark area of an object,

• the mark detection method comprising:
• emitting a first measurement light to the mark area;
• deflecting a second measurement light including at least one part of a zeroth-order light and a diffracted light generated by an irradiation of the first measurement light to the mark area from the first optical system and irradiating the mark area with the deflected second measurement light as a third measurement light;
• and
• optically receiving a fourth measurement light including at least one part of a zeroth-order light and a diffracted light generated by an irradiation of the third measurement light to the mark area.

A mark detection method of detecting a mark formed in a mark area of an object,

• the mark detection method comprising:
• emitting a measurement light to the mark area, the measurement light including a plurality of light components having different wavelengths, respectively;
• aligning a traveling direction of the light component having a first wavelength in the measurement light from the mark area and a traveling direction of the light component having a second wavelength different from the first wavelength in the measurement light from the mark area and emitting the light component having the first wavelength and the light component having the first wavelength;
• and
• optically receiving at least one part of the emitted measurement light.