Optical module with an anticollision device for module components
AssigneeCarl Zeiss SMT GmbH
InventorsJoachim Hartjes, Alexander Wolf, Toralf Gruner
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AssigneeCarl Zeiss SMT GmbH
InventorsJoachim Hartjes, Alexander Wolf, Toralf Gruner
Estimating the term…
The disclosure relates to an optical module with first and second components, a supporting structure and an anticollision device. The first component is supported by the supporting structure and is arranged adjacent to and at a distance from the second component to form a gap. The supporting structure defines a path of relative movement, on which the first and second components move in relation to one another under the influence of a disturbance, a collision between collision regions of the first and second components occurring if the anticollision device is inactive. The anticollision device includes a first anticollision unit on the first component, which produces a first field, and a second anticollision unit on the second component, which is assigned to the first anticollision unit and produces a second field.
An optical module, comprising:
Dependencies are inferred from the claim text.