Electro-optical device, method of manufacturing electro-optical device, and electronic apparatus

An electro-optical device comprising:

• a substrate;
• a torsion hinge disposed above the substrate;
• a flat plate disposed on the torsion hinge;
• a supporting portion in which a resin is filled in a recess protruding from the flat plate toward the torsion hinge;
• and
• a reflective layer which completely covers a surface of the flat plate in a plan view,
• wherein a height of the resin is larger than a diameter of the resin, and
• wherein a height difference between a height from the torsion hinge to a surface of the resin at a side opposite to the substrate and a height from the torsion hinge to a surface of the flat plate at a side opposite to the substrate is equal to 0.2 μm or less.

An electro-optical device comprising:

• a substrate;
• a torsion hinge disposed above the substrate;
• a conductive layer disposed above the torsion hinge;
• and
• a reflective layer disposed on the conductive layer, wherein
• the conductive layer includes a support post and flat plate,
• the support post is formed continuously with the flat plate, protrudes toward the torsion hinge and contacts the torsion hinge,
• the reflective layer contacts the flat plate, and
• A>B, wherein
• A is a thickness of the flat plate, and
• B is a thickness of the reflective layer.