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US 2019/0170911 A1Published application
Scale and manufacturing method of the same
AssigneeMitutoyo Corporation
InventorToshihiko Aoki
Life of this patent
Estimating the term…
Abstract
A scale includes: a substrate; scale gratings that are formed on a face of the substrate and has a plurality of gratings at a predetermined interval; and a protective layer that is made of fluoride and covers the scale gratings and an exposed portion of the face of the substrate.
Claims10
A scale comprising:
- a substrate;
- scale gratings that are formed on a face of the substrate and has a plurality of gratings at a predetermined interval;
- and
- a protective layer that is made of fluoride and covers the scale gratings and an exposed portion of the face of the substrate.
1 more element
A manufacturing method of a scale comprising:
- forming a protective layer on a face of a substrate by a plasma polymerization, the substrate having scale gratings of a plurality of gratings arranged at a predetermined interval, the protective layer being made of fluoride and covering the scale gratings and an exposed portion of the face of the substrate.
Dependencies are inferred from the claim text.