Method of Making Semiconductor X-ray Detectors

Abstract

Disclosed herein is a method comprising: obtaining a substrate comprising an electronic system in or on the substrate, and a plurality of electric contacts on a first surface of the substrate, the electronic system being electrically connected to the electric contacts; obtaining a chip comprising an X-ray absorption layer, the X-ray absorption layer comprising an electrode; electrically connecting the electrode to at least one of the electric contacts by bonding the chip to the substrate; and thinning the substrate at a surface opposite the first surface.

Dependencies are inferred from the claim text.